Naslov (eng)

Simulation of Proton Beam Effects in Thin Insulating Films

Autor

Timotijevic, Ljubinko
Fetahovic, Irfan
Lazarevic, Djordje
Vujisic, Milos

Opis (srp)

Abstract: Effects of exposing several insulators, commonly used for various purposes in integrated circuits, to beams of protons have been investigated. Materials considered include silicon dioxide, silicon nitride, aluminium nitride, alumina, and polycarbonate (Lexan). The passage of proton beams through ultrathin layers of these materials has been modeled by Monte Carlo simulations of particle transport. Parameters that have been varied in simulations include proton energy and insulating layer thickness. Materials are compared according to both ionizing and nonionizing effects produced by the passage of protons.

Jezik

engleski

Datum

2013

Licenca

Ovo delo je licencirano pod uslovima licence
Creative Commons CC BY 4.0 - Creative Commons Autorstvo 4.0 International License.

http://creativecommons.org/licenses/by/4.0/legalcode

Deo kolekcije (1)

o:28516

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